Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 1 of 1 for “"aberration reduction"”.
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Minimizing electron optical aberrations
"This thesis deals with topics of aberration reduction in high voltage ("""" 100 k V) electron optical instruments, especially used for lithography (SCALPEL) and high resolution electron microscopy (HREM). Since the invention by Berger and Gibson [1) in 1989, SCALPEL (SCattering with Angular …