Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 16 of 16 for “"X-ray lithography"”.
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Aligned T-gate, fabrication using X-ray lithography
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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Fabrication of distributed feeback devices using X-ray lithography
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
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Optical and mechanical characterization of thin membranes for X-ray lithography
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
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Distortion analysis on an improved mask technology for X-ray lithography
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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Implementation of an ultra deep x-ray lithography (UDXRL) system at CAMD
… in PMMA were fabricated, using deep X-ray lithography at the wiggler radiation source at the Center for Advanced Microstructures and Devices (CAMD). For the first time the concept of stacked exposures has been experimentally verified and tested. <br> <br>The work consists of two main …
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Development of X-ray lithography and nanofabrication techniques for III-V optical devices
… two lines: (1) development of an advanced x-ray mask system that addresses future nanolithography needs, and (2) development of fabrication techniques that addresses problems specific to Bragg-grating-based filters. A new x-ray mask configuration is described that improves many aspects of the …
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Sub-50nm x-ray lithography with application to a coupled quantum dot device
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
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Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.
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X-ray lithographic alignment and overlay applied to double-gate MOSFET fabrication
… the gate length. The gates are defined using X-ray lithography (a close-proximity shadow printing scheme). The associated alignment scheme, Interferometric Broad Band Imaging (IBBI), has been proven to yield nanometer level sensitivity. While the IBBI alignment system offers superior alignment …
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Estimation of Future Manufacturing Costs for Nanoelectronics Technology
… devices were also addressed. The use of x-ray lithography for the construction of devices on a 3nano-scale2 was considered. Next, cost trends within the microelectronics industry were explored. Although the cost per transistor has been observed to decrease, total equipment costs and …
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Self assembly of block copolymers : applicability in microelectronics and gains for patterned media
… Introduction of newer method such as E-beam, X-ray lithography etc. has demonstrated possibility of scaling to lower dimensions. However most of these methods are too expensive, too complex or too slow. Hence a method is required which can provide high resolutions at low cost, is easy to …
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Electrodeposited metal matrix nanocomposites as thin films and high aspect ratio microstructures for MEMS
… Recessed electrodes were prepared using X-ray lithography. Partial current density, current efficiency and deposited particle concentration were determined with RDE’s. Cu--Al2O3, Cu-CeO2 and Cu-TiO2 micropost nanocomposites were successfully performed into 500 m deep recesses. Particle …
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HIGH-PERFORMANCE PERIODIC ANTENNAS WITH HIGH ASPECT RATIO VERTICAL FEATURES AND LARGE INTERCELL CAPACITANCES FOR MICROWAVE APPLICATIONS
… the SE-EBG-RA as the element of a series-fed array structure is investigated and some sample high-efficiency, flat array antennas are rendered. A microstrip antenna is also developed, the structure of which is composed of 3×3 unit cells and shows fast-wave behaviors. Most antenna designs are …
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FABRICATION AND THERMAL ANALYSIS OF POLYIMIDE-BASED X-RAY MASKS AT THE SYNCHROTRON LABORATORY FOR MICRO AND NANO DEVICES, CANADIAN LIGHT SOURCE
In deep X-ray lithography (DXRL), synchrotron radiation (SR) is applied to transfer absorber patterns on an X-ray mask into the photoresist to fabricate high-aspect-ratio micro and nano scale structures (HARMNST). The Synchrotron Laboratory for Micro and Nano Devices (SyLMAND) at the Canadian Light …
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Mikrostrukturierung präkeramischer Polymere mit Hilfe der UV- und Röntgentiefenlithographie
Aufgrund ihrer herausragenden physikalischen und chemischen Eigenschaften gewinnt die Herstellung von Mikrokomponenten aus keramischen Materialien zunehmend an Bedeutung. Verschiedene Formgebungsverfahren wie das Hoch- und Niederdruck-Mikrospritzgießen keramischer Feedstocks sind etabliert. …