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Showing 1 to 17 of 17 for “"Wet Chemical Etching"”.
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Fabrication of capacitors based on silicon nanowire arrays generated by metal-assisted wet chemical etching
… of the mechanisms of metal assisted wet chemical etching for fabrication of arrays of silicon nanowires, and then use this understanding to build nanowire array on-chip capacitors in silicon substrates, in order to eliminate additional packaging and enable local and efficient energy …
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Laser assisted nano-optics processing in optical data storage
… on the microlens array patterning followed by wet chemical etching to fabricate 3D nanostructures. To further reduce the feature size, near-field scanning optical lithography is employed and the near-field distribution at the fiber tip is simulated to study its effect on the patterned features. …
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Rashba-Effekt in niedrigdimensionalen InGaAs/InP Strukturen
… phase epitaxy and a newly developed selective wet chemical etching process. Magneto-transport measurements have revealed two important properties of the spin-orbit coupling in such wires. For wider wires the strength of the interaction (coupling constant) could be extracted from transport …
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Process Development and Characterization of AlGaN/GaN Heterostructure Field-Effect Transistors
… processing techniques such as isolation etching, low-resistance drain/source ohmic contacts, and Schottky gate formation. These efforts along with related processing issues will be discussed. Devices were then fabricated on epitaxial layers grown on sapphire substrates and on n-type, …
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Theoretical and experimental investigation of chemical pattern etching
The processes occurring during wet chemical etching of partially masked copper surfaces for pattern definition were investigated. Chemical dissolution of rectangular cavities with active copper base and inert photoresist sidewalls was carried out in the presence of flowing acidic cupric chloride …
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Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen
… affects the surface morphology obtained after wet chemical etching. The technological goal was the design of ZnO:Al films with optimized surface texture and thus light scattering properties for the application as front contact in amorphous (a-Si:H) and microcrystalline (µc-Si:H) based thin film …
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Characterization of the photochemical etching process: an alternative microfluidic device fabrication method
A newly developed process known as photochemical etching (PC etching), which combines optical imaging and wet chemical etching, can be utilized as an alternative to fabricate the master mold of a microfluidic device. During this process, a semiconductor substrate is submerged in an etchant …
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Fiber Optic Pressure Sensor Fabrication Using MEMS Technology
… silica diaphragms have been micro-machined using wet chemical etching in order to form extrinsic Fabry-Perot (FP) interferometric cavities. Sol-gel is used as an intermediate-layer for both fiber-ferrule bonding and ferrule-diaphragm bonding at relatively low temperature (250 °C). The pressure …
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InGaAs self-aligned HEMT for logic applications
… is an improvement over previous results using wet chemical etching. A 90 nm self-aligned enhancement-mode device with a vertically scaled insulator thickness of 5 nm was fabricated. The device has outstanding logic figures of merit with a VT of 60 mV, g, of 1.3 S/mm, SS of 71 mV/dec, DIBL of 55 …
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Microfabrication and Evaluation of Planar Thin-Film Microfluidic Devices
… thermal evaporation, plasma enhanced chemical vapor deposition (PECVD), and wet chemical etching to ultimately provide hollow-core channels. When these microcapillaries are filled with buffer and potentials are applied across them, control of the flow in the channels can be …
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III-V compound semiconductor integrated charge storage structures for dynamic and non-volatile memory elements.
… fabrication. The fabrication methods employ wet chemical etching and ohmic metal liftoff techniques. Electrical dc and charge retention time characteristics along with functionality read/write operations for the memory element group are measured using commercial electronic test equipment.
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Optical studies of ion-bombarded gallium arsenide
… LO Raman intensity measurements together with wet chemical etching. A graded damage model proposed in the work well explains the observed LO intensity in the ion-damaged, chemical-etched GaAs. The reflectivity measurements qualitatively support the Raman scattering findings. In addition, the …
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Umladen von Fremdionen beim Modifizieren von Glas mit UV-Laserstrahlung für das Farbmarkieren und Strukturieren
… glass in combination with subsequent wet chemical etching. The observed changes in absorption and concentration in the optical spectra of cerium and silver doped photosensitive glass are due to photo-induced ionisation of the donator cerium. This result is confirmed by the measured …
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Development of Cu particle sintering as die attach solution for high temperature electronics applications
… behaviour. This is achieved through selective wet chemical etching of zinc (Zn) from α-brass flakes using hydrochloric acid (HCl), a process known as dezincification, which creates surface modifications that enhance material transport during sintering. Polyethylene glycol 600 (PEG600) is …
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Lichtstreuende Oberflächen, Schichten und Schichtsysteme zur Verbesserung der Lichteinkopplung in Silizium-Dünnschichtsolarzellen
… targets. These films can be surface-textured by wet-chemical etching in diluted hydrochloric acid leading to a particularly efficient light scattering and subsequent light trapping. In a comprehensive material study the ZnO:Al films are characterized electrically, optically and structurally. …
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Growth, Structural and Electrical Characterization of Topological Dirac Materials
… Hall bars fabricated using Ar+ milling and wet chemical etching were compared. The results showed a more bulk type response in the chemical etched sample even though Ar+ milling was responsible for creating more disorder in the system leading to a higher carrier density and lower mobility. A …
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Optical Fiber Microstructures for Self-Contained Whispering Gallery Mode Excitation
… fiber and WGMs in a microsphere resonator. The etching processes have been tuned to enable secure storage of a microsphere while also providing efficient excitation and interrogation of WGMs. Furthermore, the methods have been designed to be staightforward, quick, and repeatable. Using standard …