Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
Results
Showing 1 to 4 of 4 for “"Virtual metrology"”.
-
Virtual metrology for plasma etch processes.
… a lack of relevant and/or regular measurements. Virtual metrology (VM) is the use of mathematical models with accessible measurements from an operating process to estimate variables of interest. This thesis addresses the challenge of virtual metrology for plasma processes, with a particular focus …
-
Computational Intelligence Techniques for OES Data Analysis
… development of advanced analysis algorithms for virtual metrology, anomaly detection and variables selection is fundamental in order to effectively use OES measurements in a production process. This thesis focuses on computational intelligence techniques for OES data analysis in semiconductor …
-
Applications of Probabilistic Machine Learning Models to Semiconductor Fabrication
… in four distinct case studies. First, we study virtual metrology systems, with two goals in mind. Our first goal is to define a virtual metrology framework that allows us to better understand the sources of error commonly seen in these systems. This framework relates the recipe, chamber, sensor, …
-
Integrated performance prediction and quality control in manufacturing systems
… of products coming out of it. The concept of Virtual Metrology (VM) addresses the quality control problem by using data-driven models that relate the product quality to the equipment sensors, enabling continuous estimation of the quality characteristics of the product, even when physical …