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Showing 1 to 1 of 1 for “"Vapor-liquid-solid (VLSI)"”.
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Array-based planar nanowire high electron mobility transistor
… digital/RF IC. Bottom-up grown NWs via the vapor-liquid-solid (VLS) mechanism are of particular interest for NW-FET application because the as-grown 3D NW structures require no lithography or chemical etching to define. However, fabricating bottom-up NW-FETs and circuits in wafer-scale is …