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Showing 1 to 1 of 1 for “"Ultra-high precision positioning"”.
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Model reference control for ultra-high precision positioning systems
Due to the increasing demands of high-density semiconductors, molecular biology, optoelectronics, and MEMS/NEMS in the past decades, control of ultra-high precision positioning using piezoelectricity has become an important area because of its high displacement resolution, wide bandwidth, low power …