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Showing 1 to 1 of 1 for “"UV Licht Oxidation"”.
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Dünnschichtsysteme für den Einsatz in magnetischen Tunnelstrukturen
… found at low temperatures. In the second part, a UV light assisted oxidation process for preparation of MTJs is presented in the Co/Al-oxide/Co trilayer system. Investigations are presented and discussed on two different oxidation systems and the influence of the UV light on the oxidation process …