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Showing 1 to 2 of 2 for “"Trench fill"”.
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Neogene seismotectonics of the south-central Chile margin : subduction-related processes over various temporal and spatial scales
… to emphasize the influence of climate-driven filling of the trench on the mechanics and kinematics of the margin. I show that forearc basins in the 34-45°S segment record Eocene to early Pliocene extension and subsidence followed by ongoing uplift and contraction since the late Pliocene. I …
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Coating and filling of nanometer-scale structures using chemical vapor deposition
Void-free filling of high aspect ratio (AR = 3 to 10) structures, such as trenches or vias, is necessary in nanoscale device fabrication. Examples include shallow trench isolation, metallization, and reverse tone patterning in integrated circuits and optical waveguides in photonic devices. …