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Showing 1 to 1 of 1 for “"Torsional resonance atomic force microscope"”.
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Fault detection and diagnosis : application in microelectromechanical systems
… electrostatic parallel-plate microactuator and a torsionally resonant atomic force microscope. From an engineering point of view, failure modes appeared in the microcomponents of the microactuator and the TR-AFM are encountered as parameter variations and are captured, isolated and identified by …