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Showing 1 to 3 of 3 for “"Tip-based nanofabrication"”.

  1. Nano-electro-mechanical systems fabricated by tip-based nanofabrication

    … dissertation explores the use of a heated AFM tip for fabrication of NEMS devices. Two critical challenges hindering TBN from NEMS fabrication are addressed in this thesis. First, we experimentally found out that polystyrene nanopatterns deposited by a heated AFM tip can serve directly as etch …

    uiuc Repository record for Nano-electro-mechanical systems fabricated by tip-based nanofabrication (opens in a new tab)

  2. Electro-thermal nanoprobes for nanometrology and nanofabrication

    … that inhibit their application towards nanofabrication, including difficulty in maintaining tip shape under harsh conditions, an inability to simultaneously control thermal and electric potentials, and inadequate methods for determining tip-substrate interface temperature. This …

    uiuc Repository record for Electro-thermal nanoprobes for nanometrology and nanofabrication (opens in a new tab)

  3. High-throughput plasma nanomanufacturing and its applications

    … presents a low-cost, high-throughput plasma-based nanomanufacturing process, called simultaneous plasma enhanced reactive ion synthesis and etching (SPERISE), to address the technical challenges in mass producing nanoscale structures, components, and devices. This process incorporates and …

    uiuc Repository record for High-throughput plasma nanomanufacturing and its applications (opens in a new tab)