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Showing 1 to 2 of 2 for “"Thin films -- Mechanical properties."”.
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Determination of UO2 thin films mechanical properties under heavy ion irradiation using nanoindentation and finite element modeling
The mechanical response of UO2 to irradiation is becoming increasingly important due to the shift to higher burn-up rates in the next generation of reactors. In the current study, thin films of UO2 were deposited on YSZ substrates using reactive-gas magnetron sputtering. Nanoindentation was used to …
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Influence of design and coatings on the mechanical reliability of semiconductor wafers.
We investigate some of the mechanical design factors of wafers and the effect on strength. Thin, solid, pre-stressed films are proposed as a means to improve the bulk mechanical properties of a wafer. Three-point bending was used to evaluate the laser scribe density and chemical processing effect …