Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 61 for “"Thin Film Deposition"”.
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Multiscale modeling of thin film deposition processes
Ionized physical vapor deposition (IPVD) and electrochemical deposition (ECD) are two major thin film deposition processes in the microelectronics industry. The ion fluxes with high kinetic energies in IPVD process involve complex surface interactions that affect overall topology of the microscale …
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Ion assisted magnetron sputtering of tantalum thin film deposition and characterization
… on the crystallographic phases of tantalum films during their deposition by magnetron sputtering process, and to gain understanding of the mechanism of the ion-solid interactions during the thin film growth. Tantalum (Ta) exists in two distinct crystallographic phases: a stable [alpha]-phase …
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Optimization of the automated spray layer-by-layer technique for thin film deposition
… of the automated Spray-LbL technique for thin film deposition have been investigated in order to-identify their effects on film thickness and roughness. We use the automated Spray-LbL system developed at MIT by the Hammond lab to build 25 bilayer films of poly (ally amine hydrochloride) …
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An Investigation of Flow-Limited Field-Injection Electrostatic Spraying (Ffess) and Its Applications to Thin Film Deposition
Deposition of TiO2 and silver thin films using multi jet FFESS is studied, demonstrating great control on film morphology and properties. TiO2 thin films deposited on high-intensity discharge arc lamps are found to improve the quality of its light output. Silver thin films of high purity and …
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Solution-Processed Thin Film Deposition and Characterization of Multinary Chalcogenides: Towards Highly Efficient Cu2BaSn(S,Se)4 Solar Devices
… the level comparable to already commercialized thin-film solar energy converting technologies. The I2-II-IV-VI4 (I = Li, Cu, Ag; II = Ba, Sr; IV = Si, Ge, Sn; VI = S, Se) family of materials offer tunable structural, optical, and electronic properties that can potentially enable their pervasive …
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Electroless Atomic Layer Deposition
Thin film growth is studied by many researchers because of broad applications and significant impact on technological development in modern era. However, thin film nucleation and growth is challenging task for many materials with high surface energy and melting temperature. Such systems tend to …
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Organic Thin Films Deposited by Emulsion-Based, Resonant Infrared, Matrix-Assisted Pulsed Laser Evaporation: Fundamentals and Applications
<p>Thin film deposition techniques are indispensable to the development of modern technologies as thin film based optical coatings, optoelectronic devices, sensors, and biological implants are the building blocks of many complicated technologies, and their performance heavily depends on the applied …
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Surface Reaction Mechanisms for Plasma Processing of Semiconductors
… polymer from trenches following etching and the deposition of a continuous barrier layer are critical processes for integration PS as ILDs. To investigate these issues, a reaction mechanism for plasma stripping of residual fluorocarbon polymer using oxygen-based chemistries has been developed and …
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Re-strengthening demineralized bone via tannin-iron crosslinking
… ever. Using tannin iron complexes we show that thin film deposition of the complexes are not only possible but effective at strengthening demineralized bone. Furthermore we show that by taking advantage of newly discovered tris-complexes that are able to form between tannic acid and ferrous iron …
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Structure and epitaxy studies of cobalt silicide/silicon heterostructures
… diffusion, silicide spike formation during CoSi thin film growth, and volumetric contractions during the CoSi $\to$ CoSi$\sb2$ phase transformation. Multilayer Si$\sb{\rm a}$/Co/Si$\sb{\rm c}$ thin film deposition is an effective processing technique for controlling microstructure and preventing …
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Methodology, morphology, and optimization of carbon nanotube growth for improved energy storage in a double layer capacitor
… growth conditions, catalyst variations, and thin-film deposition techniques in order to achieve growth of a high density, vertically-aligned carbon nanotube array suitable for use as an electrode. This thesis describes the methodology of modifying a significant number of parameters in order …
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Growth and characterisation of textured superconducting tapes
MgO thin films were deposited on Si (100) single crystals, NiW tapes, 310 austenitic stainless steel and Hastelloy C276 by the ultrasonic Spray Pyrolysis technique, using magnesium nitrate and magnesium acetate as precursors at many different conditions. Thermogravimetrical analysis (TGA) of the …
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Investigation and Characterization of Composite Silica Aerogel Nanostructures Obtained Via Magnetron Sputtering
This study explores the deposition of Copper (Cu) onto hydrophilic Silica Aerogel (SA) monoliths using magnetron sputtering, with Cu thicknesses of 20 nm, 50 nm, and 100 nm. Leveraging the mesoporous nanostructure of SA, a Cu-sputtered SA nanocomposite was fabricated, creating a non-homogeneous …
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Depositing highly crystalline thin film silicon for photovoltaic solar cells utilizing metal surface wave plasmas
… create low damage, high speed deposited silicon thin films for solar photovoltaics. Studies characterizing thin films have been performed in the past, but very few utilizing the MSWP. Due to the high electron densities and low electron temperatures characteristic of MSWPs, it is shown that this …
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Initiated chemical vapor deposition of polymeric thin films : mechanism and applications
Initiated chemical vapor deposition (iCVD) is a novel technique for depositing polymeric thin films. It is able to deposit thin films of application-specific polymers in one step without using any solvents. Its uniqueness of in situ surface polymer synthesis distinguishes iCVD from conventional …
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Evaluation of fluid dynamic effect on thin film growth in a horizontal type meso-scale chemical vapor deposition reactor using computational fluid dynamics
To design and analyze chemical vapor deposition (CVD) reactors, computer models are regularly utilized. The foremost aim of this thesis research is to understand how thin film uniformity can be controlled in a CVD reactor. A complete understanding of chemical reactions that take place both in gas …
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Experimental studies of liquid marbles and superhydrophobic surfaces
… topography of the surface. Photolithography and thin-film deposition fabrication techniques have been used to create hydrophobic and superhydrophobic surfaces for use in electrowetting experiments. Both AC and DC electrowetting behaviour has been investigated and the results have been shown to be …
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Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)
… transducer (PMUT) based on the piezoelectric thin film deposition of lead zirconate titanate (PZT) is defined. Through high frequency vibration (1-16MHz) of a thin plate, the PMUT transmits and receives pressure pulses to construct medical ultrasound images as an alternative to bulk …
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