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Showing 1 to 1 of 1 for “"Teilchenenergien"”.
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An Investigation of Target Poisoning during Reactive Magnetron Sputtering
Objective of the present work is a broad investigation of the so called "target poisoning" during magnetron deposition of TiN in an Ar/N2 atmosphere. Investigations include realtime in-situ ion beam analysis of nitrogen incorporation at the Ti sputter target during the deposition process …