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Showing 1 to 2 of 2 for “"TFBAR"”.
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Molecular characterization of methylated circulating tumour DNA biomarkers and their detection with low-cost biosensor
… known as Thin Film Bulk Acoustic Resonator (TFBAR). In-liquid biosensing of these targets with TFBAR sensor was demonstrated based on the ability of these devices to detect mass changes at the surface by tracking the resonance frequency. With optimal surface functionalization, the performance …
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Integration of ferroelectric thin films into silicon based microsystems
… are thin film bulk acoustic resonators (TFBAR) relying on the generation of acoustic waves due to electrostriction and showing a resonance at 6.2 GHz as well as a dielectric bolometer for the detection of infrared radiation. Beyond, experiments with PZT coated metal foils exhibit higher …