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Showing 1 to 1 of 1 for “"Surface conditioning technologies, Si/Gate oxide interface, Microelectronics"”.
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STUDY AND CHARACTERIZATION OF INNOVATIVE CLEANING METHODS IN MICROELECTRONICS
The purpose of this thesis was the investigation of issues that may affect the most critical interfaces constituting the electronic devices heart, such as Silicon/Gate Oxide interface, in the context of the technological development marked by the "More than Moore" law. As object of this study, one …