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Showing 1 to 20 of 23 for “"Surface Micromachining"”.
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Fabrication and material characterization of silver cantilevers via direct surface micromachining
… stage, we present a mask-less, or direct, surface micromachining process flow with a 250°C thermal budget. The process uses Cabot Corp.'s silver-based conductive ink for the structural layer and PMMA for the sacrificial layer. Several other materials were tested for use as sacrificial inks …
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Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning
… are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the …
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On-Chip Actuation of Compliant Bistable Micro-Mechanisms
… and tested using either the MUMPs or SUMMiT surface micromachining technology.
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A micromachined thermo-optical light modulator based on semiconductor-to-metal phase transition
… transition related optical switching by using surface micromachined low-thermal-mass pixels to achieve good thermal isolations, which ensures that each pixel can be individually switched without cross talking. In operation, the pixel temperature was controlled by integrated resistor on each …
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Predicting the Effects of Dimensional and Material Property Variations in Micro Compliant Mechanisms
<p>Surface micromachining of micro-electro-mechanical systems (MEMS), like all other fabrication processes, has inherent variation that leads to uncertain material and dimensional parameters. To obtain accurate and reliable predictions of mechanism behavior, the effects of these variations need to …
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Microelectromechanical Systems (Mems) for Radio Frequency Applications
… devices (tunable capacitors and inductors) using micromachining technology. First, a new wide-tuning-range tunable capacitor design is proposed and prototype devices are fabricated using surface micromachining technology. This new tunable capacitor has the advantages of simple configuration, …
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Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation
… work were fabricated in the MUMPs and SUMMiT V surface micromachining MEMS fabrication technologies. The Stacked Amplified Thermomechanical In-plane Microactuator (StATIM) is also introduced. The StATIM is a compact linear output actuator based on the ATIM that is capable of large displacements …
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CHARACTERIZATION OF SILICON SURFACE MICROMACHINED MEMS DEVICES
This paper introduces silicon surface micromachined devices, and primarily focuses on the characterization of a silicon-surface gyroscope and a laterally isolated accelerometer. Unlike most micromachined gyroscopes that consist of a single resonator, this gyroscope takes advantage of two …
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Modeling and characterization of microelectromechanical systems condenser microphone
… the new microphone designed and developed using surface micromachining technology and compatible with the CMOS technology at the Semiconductor fabrication facility. The membrane performance simulations of the new microphone such as its compliance and natural frequencies have been successfully …
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Novel probe structures for high-speed atomic force microscopy
… an indispensable metrology tool for nanoscale surface characterization. Today, research and industry demand faster and more accurate metrology and these demands must be met expediently. Traditional AFM cantilevers and associated actuators (i.e. piezoelectric) are limited in regards to actuation …
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Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)
… the Polychromator, is fabricated by polysilicon surface-micromachining and consists of many parallel elements, each 20 microns wide and a centimeter in length. Typically, achieving such a large travel would require prohibitively large gaps and actuation voltages. In order to reduce the actuation …
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Multimaterial fiber microelectromechanical systems based on electrostrictive P(VDF-TrFE-CFE)
… of electromechanical transducers using bulk and surface micromachining processes has enabled the deployment of microelectromechanical systems (MEMS) in a variety of applications, from cell phones and ink-jet printers to drug delivery devices. A recently developed approach for the fabrication of …
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Minimally invasive capacitive micromachined ultrasonic transducers array For biomedical applications
… and treatment. A two-layer poly-silicon surface micromachining process mixed with bulk micromachining process was developed. Based on this process, three prototypes of application were developed in this research:1) a multi-looking imager, 2) a miniaturized invasive ultrasonic probe, and …
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Switchable stiffness scanning microscope probe
… the stiffness of the probe adjustable to the surface hardness of the sample, and a very low overall stiffness, which is needed in order to achieve high resolution imaging. The switchable stiffness probe allows the scanning of biological samples with varying surface hardness without changing …
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MEMS Coulter counter for dynamic impedance measurement of time sensitive cells
… devices were then fabricated using a series of surface micromachining, SU-8 and PDMS processes on glass slides. The fabricated devices were tested by injecting saline water with different standard size latex microbeads as well as various types of cells including fibroblast cells, red blood cells …
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Design and fabrication of one and two axis nickel electroplated micromirror array
… fabrication process can be performed by surface micromachining technologies with a thick photoresist sacrificial layer. The torsion beams were designed with a serpentine shape in order to optimize the voltage necessary to tilt the micromirror by [plus or minus] 10o. Micromirror devices …
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One-Dimensional MEMS Optical Phased Array Systems Based on Surface Micro-Machined Silicon Mirrors for Scanning LiDAR Applications
… system that is fabricated using a conventional surface micromachining process, leading to a simplified design for the OPA technology. The one-dimensional OPA device utilizes an array of piston-type micromirrors which act as optical phase shifters. Each metal coated polysilicon micromirror is …
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Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
… and one for fine motion; both are fabricated by surface micromachining. The nanopositioner has one translational degree of freedom. Thermal microactuators operate both stages. The first stage includes a bistable mechanism: it travels 52 micrometers between two discrete positions. The second stage …
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Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
… Microactuator, or TIM, and was fabricated with surface micromachining technology. A TIM requires a single releasable structural layer, is extremely flexible in design, and can operate with simple drive and control circuitry. The TIM produces linear motion of a center shuttle when slender legs on …
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Microactuators and their application in micro-opto-electro-mechanical systems (MOEMS)
… (VOA) has been designed, and fabricated by surface micromachining using PolyMUMPs (Polysilicon Multi-User MEMS Processes) foundry process. The principle is simply interrupting the light beam by a vertical microshutter. An array of SDAs have been used to drive the microshutters. Microhinges …
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