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Showing 1 to 2 of 2 for “"Superconformal coating"”.
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Super-conformal coating and filling of high aspect ratio recessed structures by two-molecule CVD
… For structures with straight sidewalls, uniform coating methods – including chemical vapor deposition (CVD) or atomic layer deposition (ALD) – typically form a void or region of low density (seam) along the centerline of the feature because the transport of precursor molecules to the bottom …
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Coating and filling of nanometer-scale structures using chemical vapor deposition
… waveguides in photonic devices. Gas-phase coating methods such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) can be operated in a regime that is kinetically limited by the surface reaction rate rather than by the precursor transport rate. In that regime, the precursor …