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Showing 1 to 2 of 2 for “"Submicron Patterning"”.
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Submicron patterning using laser interference lithography
… and initial results of an alternative nanopatterning technique called Interferometric Lithography (IL) are presented. Comprised of the identical process attributes of traditional projection photolithography, IL mirrors the wafer preparation and development procedures of our existing clean …
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Sub-micron Patterning of ZnO-PMMA Hybrid Films
Sub-micron patterning is fundamental to the fabrication of numerous devices Traditional commercial manufacturing methods either lack the resolution needed to attain the appropriate size or are prohibitively expensive due to low throughput or the necessity of expensive equipment. Imprint lithography …