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Showing 1 to 5 of 5 for “"Squeeze-Film Damping"”.

  1. Squeeze-film damping for MEMS structures

    Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

    mit Repository record for Squeeze-film damping for MEMS structures (opens in a new tab)

  2. Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields

    … These include electric actuation (AC and DC), squeeze-film damping, thermoelastic damping, and structural forces. The second objective is to investigate MEMS phenomena, such as squeeze-film damping and dynamic pull-in, and use the latter to design a novel RF-MEMS switch. In the first part of …

    vt Repository record for Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields (opens in a new tab)

  3. Surface self-compensated hydrostatic bearings

    … over rolling element bearings. The thin fluid film between the bearing pads and the rail provides virtually infinite motion resolution due to lack of static friction, very low straightness ripple, high squeeze film damping, potentially infinite bearing life, immunity to fretting, tolerance to …

    mit Repository record for Surface self-compensated hydrostatic bearings (opens in a new tab)

  4. Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing

    … Most resonators operate in vacuum because air damping at higher pressures greatly decreases both resonant frequency and quality factor. This loss is directly related to the pressure of the surrounding air, and therefore has been used in this design to measure the pressure. While the …

    mit Repository record for Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing (opens in a new tab)

  5. Untersuchung der Energiedissipationsprozesse mikromechanischer Systeme

    Im Fokus dieser Arbeit stehen Dämpfungseffekte schwingfähiger Mikroelektromechanischer Systeme (MEMS), die nach dem kapazitiven Wirkprinzip arbeiten. Die verschiedenen Dissipationsprozesse und die zugehörigen analytischen Modelle sowie numerischen Berechnungsmöglichkeiten auf physikalischer Ebene …

    qucosa-diss