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Showing 1 to 3 of 3 for “"Sputtering Theory"”.
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Harmonic Sputtering Theory
<p>ABSTRACT</p> <p>HARMONIC SPUTTERING THEORY</p> <p>By</p> <p>ZHU LIN ZHANG</p> <p>February 2010</p> <p>Advisor: Dr. Karur R. Padmanabhan</p> <p>Major: Physics</p> <p>Degree: Doctor of Philosophy</p> <p>Based on the standard Botzmann equation in Classical Statistics Mechanics, we have derived a …
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Computational modeling of expanded plasma plumes in vacuum and in a tank
… contact with. Backflow contamination can lead to sputtering and effluent deposition on critical spacecraft components. A computational method for studying these interactions was developed by David Oh in 1997. He developed a Particle-in-Cell and Direct Simulation Monte Carlo (PIC-DSMC) algorithm to …
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Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films
… metal oxide thin films deposited by magnetron sputtering in an Ar/O2 atmosphere is investigated as a function of the O2 partial pressure (p(O2)). The previously reported composition of films deposited onto grounded non-intentionally heated substrates was correlated with the dominant positive …