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Showing 1 to 2 of 2 for “"Sputtering (Physics)"”.
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Energy Distribution of Sputtered Neutral Atoms from a Multilayer Target
… particles contribute to the general knowledge of sputtering, a common technique for surface analysis. In this work emphasis was placed on the measurement of energy distribution of sputtered neutral atoms from different depths. The liquid Ga-In eutectic alloy as a sample target for this study was …