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Showing 1 to 1 of 1 for “"Sputtered tantalum thin films"”.
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Deposition of tantalum thin films by RF sputtering with substrate bias
… on the crystallographic structure of RF sputtered tantalum thin films on different substrates, particularly aluminum and silicon, have been studied. The effect of substrate biasing on ion current and film thickness has been investigated. The study included comparison between substrate ion …