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Showing 1 to 1 of 1 for “"Spiegelmatrix"”.
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Ein spiegelmatrix-basiertes optisches 3D-Messsystem für die Mikrostrukturprüfung
The goal of the work is the conception, design and validation of a new, flexible and low-priced optical surface measuring system with a resolution in the submicrometer range, i.e. for the inspection of microstructures. Quintessential point is the application of semiconductor-manufacturer Texas …