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Showing 1 to 1 of 1 for “"Spectroscopic imaging ellipsometry"”.
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Resolving oxidation phenomena in layered semiconductors and scaled heterogeneous integration for low-power electronics
… details the development and implementation of a spectroscopic imaging ellipsometry (SIE) approach for the multi-scale analysis of layered semiconductors, focusing on oxidation phenomena. A versatile fitting algorithm is adapted for the rapid determination of the material’s complex dielectric …