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Showing 1 to 2 of 2 for “"Spannungsrelaxation"”.
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Untersuchung der Relaxation elastischer Spannungen durch Helium-Implantation und thermische Behandlung in Si 1-x Ge x / Si-Heterostrukturen
The present work is investigating the relaxation of elastic stresses in Si1-xGex/Si-heterostructures after helium implantation and thermal annealing. Particular attention is directed onto the interplay of helium diffusion and the nucleation and movement of dislocation loops leading to the …
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Ion-induced stress relaxation during the growth of cubic boron nitride thin films
The aim of the presented work was to deposit cubic boron nitride thin films by magnetron sputtering under simultaneous stress relaxation by ion implantation. An in situ instrument based on laser deflectometry on cantilever structures and in situ ellipsometry, was used for in situ stress …