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Stochastic Models of Surface Limited Electronic and Heat Transport in Metal and Semiconductor Contacts, Wires, and Sheets — Micro to Nano

Martin, Pierre N.University of Illinois at Urbana-Champaign2011

We introduce novel statistical simulation approaches to include the e ect of surface roughness in coupled mechanical, electronic and thermal processes in N/MEMS and semiconductor devices in the 10 nm - 1 m range. A model is presented to estimate roughness rms and autocorrelation L from experimental …

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