Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 4 of 4 for “"Silicon oxide films"”.
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INFRARED SENSORS USING SILICON MICROSTRUCTURES
… using microbolometers are fabricated by silicon micromachining. The microbolometer detects IR radiation by sensing the temperature change that the IR radiation produces in temperature dependent resistors. The resistors are sandwiched between silicon nitride and silicon oxide films, which …
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Organic molecular floating gate memories
… structures that utilize charge storage in polysilicon floating gates imbedded in insulating silicon oxide films'. As demands for high storage density, high chip memory capacity, and decreasing process costs continue to mount, conventional flash memory has found it challenging to continue …
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Dynamics of Melt-mediated Crystallization of Amorphous Silicon Films
… melting-and-solidification behavior of a-Si films. In particular, it focuses on investigating the melt-mediated crystallization details that are associated with the a-Si films, which presumably do not contain preexisting microcrystal clusters (as for instance can be formed via high-dose …
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Development of novel alternative chemistry processes for dielectric etch applications
The removal of dielectric films in semiconductor processing relies almost exclusively on the use of perfluorocompounds (PFCs), which are suspected global warming agents. The two applications in semiconductor manufacture that account for the largest use and emissions of PFCs are the patterning of …