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Showing 1 to 1 of 1 for “"Silicon microplasma device"”.

  1. Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments

    Kim, Taek-LimUniversity of Illinois at Urbana-Champaign2010

    Novel microcavity and microchannel plasma devices in Si have provided new and efficient sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation. The realization of this new platform for devices is implemented through VLSI and MEMS fabrication techniques. In this thesis, the …

    uiuc Repository record