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Showing 1 to 1 of 1 for “"Silicon Nitride, PECVD, Photonic Integrated Circuits, Optimal Design of Experiments"”.
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Optimisation of plasma enhanced chemical vapour deposition for silicon nitride photonics using optimal design of experiments
There have been many advances in silicon nitride based integrated photonics, enabling a variety of interesting applications. The deposition of high quality and low loss silicon nitride (SiN) during the fabrication of waveguides is essential for creating useful devices. Low temperature alternatives …