Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 2 of 2 for “"Silicon Micromirror"”.
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Microelectromechanical handheld laser-scanning confocal microscope: application to breast cancer imaging
… high-reflectivity two-axis vertical comb driven silicon micromirror fabricated by a novel method compatible with complementary metal-oxide-semiconductor processing employed in the semiconductor industry. The process enables integration of rotation sensors on the chip to adaptively correct for …
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One-Dimensional MEMS Optical Phased Array Systems Based on Surface Micro-Machined Silicon Mirrors for Scanning LiDAR Applications
… OPA device utilizes an array of piston-type micromirrors which act as optical phase shifters. Each metal coated polysilicon micromirror is suspended by a pair of serpentine springs and is individually actuated at low voltage by a separate electrostatic parallel plate actuator. The field of …