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Showing 1 to 1 of 1 for “"Silicon, stress relaxation, plasticity, bending, MEMS, insitu SEM"”.
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Thermomechanical behavior of single crystal silicon microbeams under bending at elevated temperatures
… of electronic and mechanical devices. Silicon is the most commonly used material in these devices. Bulk silicon is brittle at room temperature, but is ductile at 550 ºC - a phenomenon known as brittle-to-ductile transition (BDT). Recently, there has been a speculation in the literature …