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Showing 1 to 1 of 1 for “"Si1ï€xï€yGexCy, substitutional C, strain, pile-up, precipitate, and defect"”.
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Structural, electrical and optical studies on the effects of rapid thermal processing on silicon-germanium-carbon films
A structural, electrical and optical study on the effect of rapid thermal processing on strained Si1i?-xGex, Si1i?-xi?-yGexCy alloys was reported in this thesis. Structural characterization showed that, when annealed at temperature higher than 900i??C, substitutional C changed to more stable phase …