Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 18 of 18 for “"Si/SiO₂"”.
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The Si/SiO(2) Interface Roughness
The Si/SiO$\sb2$ interface roughness has important effects on the performance of metal-oxide-semiconductor field effect transistor devices, which dominate contemporary integrated circuit technology. There have been intense efforts to study this system due to its importance. In this work, a new …
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Electron tunneling processes in Si/SiO₂ systems
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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Micro-fabrication of 3-D Si/air and Si/SiO₂/air PBG structures
Thesis (Elec. E.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998; and, Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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Studies of trap generation in silicon-dioxide and electromigration in aluminum thin films
The effects of HCl on trap generation in SiO$\sb2$ film and at Si/SiO$\sb2$ interface at high electric fields are studied by avalanche electron injection. A comparison between a 9%-HCl-oxide MOS capacitor and a dry-oxide MOS capacitor shows that HCl decreases the hydrogenation rate of the boron …
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INTERFACE EFFECTS ON NANOELECTRONICS
Nanoelectronics consist of devices with active electronic components on the nanometer length scale. At such dimensions most, if not all, atoms or molecules composing the active device region must be on or near a surface. Also, materials effectively confined to two dimensions, or when subject to …
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Optical and Interface-Based Methods of Defect Engineering in Silicon
… industry for fabrication of source and drain transistor regions. Unfortunately, implantation causes considerable damage to the substrate lattice rendering most of the implanted dopant electrically inactive. Rapid thermal annealing (RTA) heals the damage by rapidly heating the substrate with a …
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Microfabrication of silicon tips for scanning probe microscopy
This thesis investigates the microfabrication of silicon tips for Scanning Probe Microscopy. First, a microfabrication process was developed to produce silicon tips over 100 um height with a sharp apex of ~10–20 nm. To prevent inadvertent contact between the substrate bearing the tip and the sample …
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Fabrication and testing of an infrared spectral control component for thermophotovoltaic power conversion applications
Thermophotovoltaic (TPV) power conversion is the direct conversion of thermal radiation to electricity. Conceptually, TPV power conversion is a very elegant means of energy conversion. A thermal source emits a radiative spectrum, which is incident upon a photovoltaic (PV) diode. The PV diode then …
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Investigation of performance and the influence of environmental conditions on strip detectors for the ATLAS Inner Tracker Upgrade
… Large Hadron Collider (LHC) to the High-Luminosity LHC (HL-LHC) scheduled for installation in 2024, the Inner Detector will be replaced with the new all-silicon ATLAS Inner Tracker (ITk) to maintain tracking performance in this high-occupancy environment and to cope with the increase of …
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First principles-based atomistic modeling of the structural properties of silicon-oxide nanomaterials
… network (CRN) model based Metropolis Monte Carlo simulation tools which are capable of predicting the structural properties of amorphous semiconductor and oxide materials as well as their interface. To bolster the reliability of the CRN model, we have developed force fields based on gradient …
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High index contrast platform for silicon photonics
This thesis focuses on silicon-based high index contrast (HIC) photonics. In addition to mature fiber optics or low index contrast (LIC) platform, which is often referred to as Planar Lightwave Cirrcuit (PLC) or Silica Optical Bench (SiOB), the use of HIC platform has been attracting considerable …
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High efficiency thermophotovoltaic microgenerators
We proposed, designed, and demonstrated a first-of-a-kind millimeter-scale thermophotovoltaic (TPV) system using a metallic microburner, photonic crystal (PhC) emitter, and low bandgap TPV cells. Many technologies (fuel cells, Stirling, thermoelectric, etc.) that potentially enable a portable …
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Characterization of rf cylindrical magnetron plasmas and reactive ion etching of silicon/silicon dioxide: Its effect on radiation damage and contamination
… at 1.8MHz and 13.56MHz have been characterized using electrostatic probes, optical emission spectroscopy and optical actinometry. Also the etch rates and etch profiles of Si/SiO$\sb2$ for 13.56MHz were studied for various conditions in CF$\sb4$/H$\sb2$ and CHF$\sb3$ plasmas as a function of …
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Electrochemical Synthesis of Single Crystal Metal Nanowires
<p> Electrodeposition is an efficient and economical approach for template synthesis of one-dimensional (1D) nanostructured materials. Based on the porous membranes as templates during electrodeposition, metallic nanowires, nanorods, and nanotubes can overcome the geometrical restrictions to be …
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Characterization and Modeling of Low Frequency Noise and Dielectric Traps in Scaled MOSFET Devices
… and systems of better performance, higher density, and lower cost for electronic products through the past several decades. The high-K materials are introduced into the MOSFET structure to reduce the gate leakage current, increase the gate capacitance for current drive and reduce short channel …
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Structural characterisation of apatite-like materials
… substitute and implants coating due to the high similarity to the inorganic material of bone and tooth. Usually the HA lattice in living organism is substituted by different cations in order to help maintaining a normal metabolism. Once the type of substitution or substitution concentration is …
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Atomically thin molybdenum disulfide prepared via chemical vapor deposition and mechanical exfoliation: aging studies and reliability testing
Transition metal dichalcogenides (TMDs) are a class of two-dimensional materials that have attracted significant attention due to their unique electronic, optical, and mechanical properties, which makes them promising candidates for next-generation electronic, optoelectronic, and sensing devices. …