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Showing 1 to 1 of 1 for “"Semiconductors, nanopatterning, ion, XPS, LEISS"”.
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Deciphering the role of surface composition and topography in self-organized ion-induced nanopatterning of multicomponent semiconductors with in-situ and in-operando metrology
This dissertation has investigated the early stages of both topographical and compositional evolution of ion-induced nanopatterning on GaSb utilizing in-operando Grazing-Incidence Small-Angle X-ray Scattering (GISAXS), X-ray Photoelectron Spectroscopy (XPS), and Low Energy Ion Scattering …