Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 2 of 2 for “"Semiconductor integrated circuits"”.
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Thermo-optic Phase Spectroscopy techniques for multiscale thermal conductance characterization in semiconductor integrated circuits
… a critical challenge in the advancement of semiconductor integrated circuits, particularly with the emergence of three-dimensional (3D) architectures for high-performance applications. This thesis introduces Thermo-optic Phase Spectroscopy (TOPS), a family of non-destructive techniques for …
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Characterization and modeling of dry etch processes for titanium nitride and titanium films in Cl₂/N₂ and BCl₃ plasmas
In the past few years, the demands for high speed semiconductor integrated circuits have warranted new techniques in their fabrication process which will meet the ever-shrinking dimensions. The gaseous plasma assisted etching is one of these revolutionary processes. However, the plasma and the etch …