Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 58 for “"Semiconductor fabrication"”.
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Automated lot dispatching in semiconductor fabrication
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; in conjunction with the Leaders for Manufacturing Program at MIT, 2001.
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Knowledge transfer between semiconductor fabrication facility startups
… and resources required for startup and ramp of a semiconductor fabrication facility is necessary to maintain competitiveness in manufacturing operations. This research describes and examines a method developed to augment the knowledge transfer of startup processes, as well as some of the other …
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Increased semiconductor fabrication capacity through cross-site processing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998.
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Process modeling and optimization using industrial semiconductor fabrication data
… and manufacturing efficiency by having separate fabrication facilities (“fabs”) for development and manufacturing. Additionally, the industrial manufacture of a semiconductor product proceeds through several stages of production. These are typically a research and development (R&D) stage, a …
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Applications of Probabilistic Machine Learning Models to Semiconductor Fabrication
Semiconductor fabrication relies heavily on the precision and accuracy of its individual processes in order to meet device requirements. If left unchecked, variations in these processes can lead to decreased performance and yield of the final product. While analysis and control of these variations …
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Production management policies in a multiple product semiconductor fabrication facility
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997.
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Forecasting mix-sensitive semiconductor fabrication tool set requirements under demand uncertainty
Thesis (M.B.A.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering; in conjunction with the Leaders for Manufacturing Program at MIT, 2001.
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Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants
… in precision mechatronic systems for nanofabrication. In semiconductor plants, automated wafer handling is performed by Overhead Hoist Transport (OHT) vehicles that transport wafers in front opening unified pods (FOUPs). When the wafers are transported in FOUPs, semiconductor chips are at …
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Simulation of real-time scheduling policies in multi-product, make-to-order semiconductor fabrication facilities
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
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Semiconductor fabrication capacity gains through optimal allocation of product loadings and equipment sharing across process technologies
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997.
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High-power semiconductor laser arrays by metalorganic chemical vapor deposition
Semiconductor injection lasers have the capability of producing very high output powers if a large array of diodes can be fabricated. The development of useful high power semiconductor lasers depends on fabrication processes which overcome the problems associated with high power laser operation. …
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A Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomography
… techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements …
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A comparison of AB diblock and ABA triblock copolymers of polystyrene and polyferocenylsilane for nanolithography applications
… low-cost method that is compatible with existing semiconductor fabrication technologies. Though various studies have looked at several combinations of block copolymers we focus on the use of solvent annealing as a method to tune the morphology of PS-b-PFS and PS-b- PFS-b-PS block copolymers. These …
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Development of an Advanced Semiconductor Laboratory
… scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has …
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Programmable Interactions between Optical Fields and Atom-like Systems in Integrated Circuits
… (PICs), which can be manufactured with modern semiconductor fabrication, provide a platform in which such interactions can occur at scale. Implementing integrated devices enabling these interactions within programmable and scalable settings while preserving a sufficient amount of strength …
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Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication
A general rule of thumb for new semiconductor fabrication facilities (fabs) is that revenues from the first year of production must match the capital cost of building the fab itself. With modem fabs routinely exceeding $1 billion to build, this rule serves as a significant barrier to entry for …
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Characterization and modeling of pattern dependencies and time evolution in plasma etching
… DRIE is a key process for pattern formation in semiconductor fabrication. Non-uniformities are caused due to microloading and aspect ratio dependencies. The etch rate varies over time and lateral etch consumes some of the etching species. This thesis contributes a physical analysis for capturing …
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Dynamic Time Warping Constraints for Semiconductor Processing
Semiconductor manufacturing processes have become increasingly complex with the continued growth of chip manufacturing. Monitoring these processes for anomalies is crucial for maintaining quality and yield. However, a notable challenge for monitoring time series signals are the nonlinear variations …
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Integrated model-based run-to-run uniformity control for epitaxial silicon deposition.
Semiconductor fabrication facilities require an increasingly expensive and integrated set of processes. The bounds on efficiency and repeatability for each process step continue to tighten under the pressure of economic forces and product performance requirements. This thesis addresses these issues …
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Potential for utilization of radio frequency identification in the semiconductor manufacturing intermediate supply chain
… specific portion of the supply chain between a semiconductor manufacturer and one of its major customers. The purpose is to dive deeply into one particular segment of the logistical process between these two entities--namely, the function of transport and storage of microprocessors after …
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