Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 5 of 5 for “"Semiconductor device fabrication"”.
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Optimization of the Process for Semiconductor Device Fabrication in the MicrON 636 Whittemore Cleanroom Facility
… is to develop and optimize a process for the fabrication of basic semiconductor devices in silicon using the Modu-lab toolset in the MicrON 636 Whittemore cleanroom facility. This toolset is designed to work with four-inch silicon wafers, in a class 10000 cleanroom. Early work on this process …
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Digital projection photochemical etching for gray-scale semiconductor applications
In the contemporary semiconductor industry, with the ever-growing demand for smaller, denser, and newer device features, various industrial and academic research groups across the world are looking beyond the conventional planar lithography and fabrication methods for semiconductor materials. The …
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Atomic Layer Deposition of Vanadium Dioxide: Synthesis, Doping, and Device Applications
… of applications. The MIT makes VO₂ useful for devices with improved switching performance and as the building block for alternative computing architectures such as oscillators and memristors. The pressing issue of integrating VO₂ into the existent semiconductor device fabrication process is the …
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Scaling to submicron for III-nitride optoelectronic devices: Applications in micro light emitting diodes and resonant tunneling diodes
Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2027-05-01