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Showing 1 to 3 of 3 for “"Semiconductor Photolithography"”.
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Design Concepts for High-Acceleration Linear Actuators for Precision Motion
Advances in semiconductor photolithography scanners have made it possible to produce smaller, more affordable chips with higher throughput. Some of the key lithographic scanner components supporting these advancements are electromagnetic actuators responsible for positioning the long-stroke (LS) …
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Electrostatically Levitated Object Handoff to Minimize Wear and Particle Generation
In semiconductor photolithography, feature sizes are reducing towards low nanometers using extreme ultraviolet (EUV) light, which requires exposure in vacuum. Even a few particles on surfaces in the optical path (such as reticles, lenses, and mirrors) pose critical limits on performance, yield, and …
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Automating microscopic image analysis post-photolithography with machine learning
Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2024-09-16 without embargo terms