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Showing 1 to 1 of 1 for “"Self-sputtering"”.
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… flux. In this work, high power impulse magnetron sputtering (HiPIMS) and its derivative, modulated pulsed power (MPP) magnetron sputtering, with their claimed high ionization capability, are proposed for the application of barrier/seed layer deposition. Their plasma properties and metal ionization …