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Showing 1 to 20 of 57 for “"SU-8"”.
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Surface functionalisation of encoded SU-8 microparticles and their uses in multiplexed suspension biological assays
… has been developed for various multiplexed suspension biological assays. These microparticles, which are manufactured using photolithography of a commercial epoxy-based negative photoresist (SU-8), contain micrometre-sized diffractive elements and can encode millions of unique codes. In this …
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Processes for the Fabrication of SU-8 Structures and Sputtered Materials on Porous Glass for Electrospray Thruster Manufacturing
… on the micron-scale to achieve PIR emission, resulting in their operation as large monolithic arrays with a single extractor to produce a usable amount of thrust, such that the failure of one emitter out of thousands could lead to full extractor and device failure. Futher, the broad parameter …
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Microfabrication and Electrochemical Characterization of a Novel SU-8 Probe with an Array of Individually Addressable Electrodes Suitable for Redox Cycling Experiments in Ultra-small Volumes
… reaction mechanism, and limited or no background subtraction, this technique is well suited for selective detection of important electrochemically active molecules such as dopamine at basal or slowly changing levels.</p> <p>Miniaturized medical devices have become an area of great interest for …
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Micromachined transmission lines for microwave applications
… line is solved by using the photosensitive resin SU-8 as the micromachinable material and as the dielectric in the strip line. Additionally, electrodeposition is applied to reinforce conductive structures to a thickness of 3µm and to fill out 15 µm deep vias. The fabrication of the strip line, …
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Effect of hydrophobicity and surface roughness on two-phase flow in rectangular microchannels
… length scale. These types of two-phase flows result in pressure variations, leading to an overall increase in pressure drop. Among various flow parameters, pressure drop is extensively used in design of microfluidic devices. There are several parameters that affect the pressure drop across …
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Refractometry Studies of the Optical Properties of Polymer Films and the Development of Polymer Coated Refractive Index Sensors
… a non-selective technique that can be used to measure almost any analyte. Miniaturized refractive index sensors, such as silicon-on-insulator (SOI) microring resonators are one possible platform, but require coatings selective to the analytes of interest. A homemade prism refractometer is reported …
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Design and fabrication of electromagnetic micro-relays using the UV-LIGA technique
… of the UV-LIGA make the technology best suited for fabricating microelectromechanical power relays. Fabrication of the device required significant advances in the optical lithography of SU-8 negative photoresist. Research proved that aspect-ratios up to 40:1 in isolated open field …
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Three-Dimensional Heterogeneous Integration for RF/Microwave Applications
… mixed-signal and baseband digital processing. In such systems, heterogeneous vertical integration, in which circuits in different technologies can be stacked on top of each other within the system architecture, can reduce the overall system size and power consumption. Chip stacking also enables …
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Origami nanofabrication of three-dimensional electrochemical energy storage devices
… origami fabrication method based on the use of SU-8 membranes and elastic gold hinges. Magnetic actuation, stress-induced folding, vertical spacing, and lateral alignment of the membranes are discussed. This thesis also reports on the used of the Nanostructured OrigamiTM process to create a …
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Interferenzlithographie mit hochaufbauenden Resistsystemen
… wurden hochaufbauende Resistsysteme (AZ9260, SU-8) auf ihre Eignung für Interferenzlithographie untersucht. Es wurden Photoresistsimulationen durchgeführt und anschließend Mikrostrukturen mit großen Aspektverhältnissen hergestellt. Dabei konnten erstmalig Mikrostrukturen mit Abmessungen im …
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Fabrication of 316-L stainless steel and composite micro machine components using softlithography and powder metallurgy process
… main stages. In the first stage, high quality SU-8 master moulds and their negative replicas soft moulds are produced using Softlithography technique. The second stage includes preparing the stainless steel slurries, filling the soft micro moulds, obtaining the green micro components, …
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Uv-liga Compatible Electroformed Nano-structured Materials For Micro Mechanical Systems
… molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA – a micro molding …
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MEMS Coulter counter for dynamic impedance measurement of time sensitive cells
… with vertical sidewalls to enable the measurements of time sensitive cells with significantly enhanced sensitivity as well as the integration of passive mixing, focusing of cells in line and impedance detection using the vertical electrodes on a single chip that is made mainly using …
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Design, fabrication, and application of stimuli-responsive hydrogel actuators
… of Ru(bpy)32+ from the first project, we successfully used visible light to trigger macroscopic movements of polyacrylic acid (PAA) based pH sensitive hydrogels through a photo catalytic water-splitting reaction system, which contains Ru(bpy)32+ as the photosensitizer and iridium dioxide …
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Fabrication and Dynamic Tuning of Periodic Structures From Holographic Lithography
… wings which show both structural color and superhydrophobicity, 3D diamond photonic crystals with controllable nano-roughness (≤ 120 nm) were fabricated from epoxy-functionalized cyclohexyl polyhedral oligomeric silsesquioxanes (epoxy-POSS). The nano-roughness was generated due to microphase …
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Ar-Xe plasma laser and microplasma propagation
… report on the development of Ar-Xe plasma in a SU-8 based microchannel structure which is suitable for on-chip gain medium for near-IR lasing at 823 nm wavelength. SU-8 microchannels with length varying from 1 cm to 5 cm and cross-section area of 100×100 µm were fabricated on silicon wafer using …
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Stabilization of Horseradish Peroxidase Using Epoxy Novolac Resins for Applications with Microfluidic Paper-Based Analytical Devices
… The longterm stabilization was exlored and SU-8 of various concentrations was found to stabilize horseradish peroxidase for times in excess of two weeks. A variety of microPAD fabrications, enzyme dispensing methods, and substrate delivery techniques were explored.</p>
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HIGH EFFICIENCY EDGE COUPLER, NOVEL NONLINEAR OPTICAL POLYMERS WITH LARGE KERR-COEFFICIENT AND AUTOMATIC LAYOUT GENERATION IN SILICON PHOTONICS
… 3rd-order nonlinear on-chip photonics usually requires high optical power. Hence the first major focus of this research is to design high-efficiency edge couplers. To achieve this goal, loss mechanisms of basic inverse taper couplers are analyzed and experimentally verified. Then a …
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Droplet behaviour in microfluidic devices
… different sized microfluidic devices, to measure the droplet volume throughout the squeezing to dripping regimes. This is achieved by manipulating the capillary number and the flow rate ratio. We observe a similar result as with the flow patterns: that the capillary number has an impact on …
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Design and fabrication of a new 3D AC-electroosmotic micropump
… the miniaturization of fluid handling devices such as micropumps. In biomedical technology, pumps for handling extremely small fluid amounts become more and more important where microsystems for biological analysis routinely use solid-state electrokinetic micropumps.<br/><br/>AC Electrokinetic …
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