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Showing 1 to 1 of 1 for “"SC2 clean"”.
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Chemistry, Detection, and Control of Metals during Silicon Processing
… including discussion of the common aqueous cleaning solutions, metallization processes, and analytical techniques that will be investigated in subsequent chapters. Chapter 2 covers initial investigations into the chemistry of the SC2 clean - a mixture of HCl, H2O2, and DI water - especially …