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Showing 1 to 1 of 1 for “"Reduced IMD capacitor"”.
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Micromachined Components for RF Systems
… enables a low-loss conductor device; a reduced intermodulation distortion (IMD) device; and a compact tunable LC module. A single-finger capacitor having a low-loss conductor with an electrode gap of 1.2um and an electrode thickness of 2.2um has been fabricated using a reverse-side …