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Showing 1 to 3 of 3 for “"Reaktives Sputtern"”.
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Structural and optical properties of copper- and nickel-oxynitride films
In this work, the structural, optical and electrical properties of copper- and nickel-oxynitride films have been investigated. The films have been deposited onto glass and silicon substrates by means of reactive dc sputtering from a metallic target in an argon/oxygen and nitrogen gas mixture. …
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Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen
This thesis addresses the development of aluminum doped zinc oxide (ZnO:Al) films by reactive sputter deposition. The study focuses on the relation between deposition conditions and the resulting electrical, optical and structural film properties. The structure of the ZnO:Al films strongly affects …
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An Investigation of Target Poisoning during Reactive Magnetron Sputtering
Objective of the present work is a broad investigation of the so called "target poisoning" during magnetron deposition of TiN in an Ar/N2 atmosphere. Investigations include realtime in-situ ion beam analysis of nitrogen incorporation at the Ti sputter target during the deposition process …