Global ETD Search
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Showing 1 to 3 of 3 for “"Reactive Ion Etch (RIE"”.
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Microstructured tungsten thermophotovoltaic selective emitters c by Natalija (Zorana) Jovanović.
This research investigates the fabrication, modeling, characterization, and application of tungsten two-dimensional (2D) photonic crystal (PhC) structures as selective emitters and means of achieving higher efficiencies in thermophotovoltaic (TPV) energy conversion systems. Important aspects of the …
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Optimization of Reactive Ion Etching to Fabricate Silicon Nitride Stencil Masks in SF6 Plasma
Stencil masks are used to print ultra-high resolution patterns using helium ion/atom beam lithography and are often manufactured from thin, free-standing silicon nitride membranes. The masks have sub-200nm openings etched through the thickness of the membrane using a reactive ion etch (RIE) process …
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Three-Dimensional Passivated-Electrode Insulator-Based Dielectrophoresis (3D-PiDEP)
The focus of this research is the isolation of waterborne pathogens which are one of the grand challenges to human health, costing the lives of about 2.5 million people worldwide each year. The aim was to develop new microfluidic techniques for selectively concentrating and detecting waterborne …