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Showing 1 to 1 of 1 for “"Radio Frequency (RF)-assisted magnetron"”.
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… materials. For this purpose, we developed an RF-assisted closed-field dual magnetron sputtering system. The “prototype” system consists of a 3-inch unbalanced dual magnetron operated at a closed-field configuration. An RF coil was fabricated and placed between the two magnetron cathodes to …