Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 4 of 4 for “"RIE etching"”.
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High-performance gallium nitride power devices with efficient edge termination structures compliant with plasma-assisted molecular-beam epitaxy based silicon nitride shadowed selective-area growth technique
… and inductively-coupled plasma reactive-ion etching (ICP-RIE) etching, introduce lattice damage and defects, causing large leakage current components. Second, inefficient edge termination (ET) designs are incapable of reaching ideal parallel-plane breakdown voltage. This work aims to overcome …
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Electro-optic polymer-based monolithic waveguide devices with multi-functions of amplification switching and modulation
… adhesion enhancing of film interfaces, waveguide RIE etching, electrode patterning and plating, wafer dicing, waveguide polishing, and wire bonding, have been investigated in depth. All these techniques can be applied to make not only electro-optic polymeric devices, but thermal-optical polymeric …
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Multigate MOSFETs for digital performance and high linearity, and their fabrication techniques
… to conventional planar MOSFETs. Conventional dry etching-induced surface damage is one of the main sources of performance degradation for multigate transistors, especially for III-V high mobility materials. It is also challenging to increase the fin aspect ratio by dry etching because of the …
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Surface enhanced Raman spectroscopy based on black silver and micro-pyramids array
Surface-enhanced Raman spectroscopy (SERS) has been increasingly utilized as an analytical technique with significant chemical and biological applications due to its high sensitivity, selectivity and accuracy. As nanotextured surfaces play a key role in SERS, production of highly sensitive, low …