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Showing 1 to 1 of 1 for “"Pt hillock formation"”.
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Formation and characterization of SrBi 2 Ta 2 O 9 (SBT)thin film capacitor module with Platinum-Titanium bottom and Platinum top electrodes
… due to new materials used for the capacitor formation like SBT and Platinum. The main process steps for the formation of the capacitor module are (A) building of the bottom electrode and its interaction with the ferroelectric layer, (B) the deposition and crystallization of the ferroelectric …