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Showing 1 to 2 of 2 for “"Pt ALD"”.
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Electromechanical response of textured ferroelectric PZT thin film stacks
… seeding (TiO2), buffer (SiO2), and conducting (Pt) layers with substantial thickness and stiffness compared to the main PZT layer. As a result, quantitative understanding of the mechanical behavior of each layer is required in order to extract the electromechanical response of the PZT layer …
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Study of Si1-xGex Junction Formation for SOI Based CMOS Technology
… Moreover, atomic layer deposition (ALD) Platinum is proposed for metal deposition on 3D epitaxial SiGe source/drain. The uniform deposition around 3D SiGe films effectively increases the contact surface area which is highly desired in the FinFET application.