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Showing 1 to 1 of 1 for “"Pt/TiOx electrodes"”.
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Formation and characterization of SrBi 2 Ta 2 O 9 (SBT)thin film capacitor module with Platinum-Titanium bottom and Platinum top electrodes
… and to characterize the interactions of the Pt/SBT/Pt stack during bottom electrode processing, SBT layer annealing, top electrode patterning and hydrogen annealing. Models are developed to explain the observed results. (A) It is shown that by using Pt/TiOx bottom electrodes higher …