Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 22 for “"Profile evolution"”.
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Feature profile evolution during the high density plasma etching of polysilicon
… simulator capable of predicting the feature profile evolution for the above plasma etching system as well as systems involving other materials and chemistries. The 2V2-dimensional simulator developed used Monte Carlo techniques to compute the transport and surface kinetics combined with a …
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Size-selective sediment transport and cross-shore profile evolution in the nearshore zone
Cross-shore bathymetric evolution in the nearshore zone often leads to threatening consequences such as beach erosion and shoreline retreat that concern the coastal community. A new, comprehensive cross-shore morphodynamic model was developed that can be used to describe and predict these …
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Study of plasma-surface kinetics and simulation of feature profile evolution in chlorine etching of patterened polysilicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.
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Chemical vapor deposition modeling using direct simulation Monte Carlo with non-linear chemistry and level set profile evolution
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
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Dynamical Sedimentary Models of Shallow Marine Environments
… serve to the illustrate shoreface equilibrium profile, shelf storm bed generation, and the shelf sedimentary facies system.</p> <p>This treatise presents a nearshore profile evolution model for the abandoned Huanghe Delta, a two-dimensional storm deposition model, and a sedimentary facies model …
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Quaternary morphology and paleoenvironmental records of carbonate islands
Here I use a simple numerical model of reef profile evolution to show that the presentday morphology of carbonate islands has developed largely in response to late Pleistocene sea level oscillations in addition to variable vertical motion and reef accretion rates. In particular, large amplitude …
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Quaternary morphology and paleoenvironmental records of carbonate islands
Here I use a simple numerical model of reef profile evolution to show that the present-day morphology of carbonate islands has developed largely in response to late Pleistocene sea level oscillations in addition to variable vertical motion and reef accretion rates. In particular, large amplitude …
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Complementary computational chemistry and surface science experiments of reaction pathways in aluminum chemical vapor deposition
… morphology, and uniformity, and device feature profile evolution (how well desired features are grown). A key ingredient to processes modeling, whether atomistic or macroscopic, is knowledge of the elementary reaction pathways and chemical intermediates, and reaction thermodynamics and kinetics. …
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Multiscale modeling of thin film deposition processes
… energy driven surface diffusion on the feature profile evolution. For the ECD process of copper, detailed surface kinetic mechanisms are developed based on the competitive adsorption/desorption model in the presence of three representative additives, poly ethylene glycol (PEG) and bis-(sodium …
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Study of plasma-surface kinetics and feature profile simulation of poly-silicon etching in Cl²/HBr plasma
… incorporated into a Monte Carlo based feature profile simulator, and profile evolution has been simulated under various processing conditions. The realistic plasma beam was used to measure the etching yields of poly-silicon with Cl2/HBr chemistry at different ion energies. The etching yields …
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Surface kinetics modeling of silicon oxide etching in fluorocarbon plasmas
… sample temperature, which are necessary for profile evolution modeling of silicon oxide etching in inductively coupled plasma. Angular dependence of etching yield of oxide in fluorocarbon plasma shows very unique behavior unlike typical ion-induced chemical etching or physical sputtering. …
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The Influence of Development and Fan/Screen Interaction on Screen-Generated Total Pressure Distortion Profiles
… of simulated total pressure distortion profiles using wire mesh screens. Although the inlet duct development of total pressure distortion patterns has been studied in a historical context when distortion effects on engine performance were first of interest, these were typically …
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Prediction of Microstructural and Conformational Evolutions through Application of Steepest-Entropy-Ascent Quantum Thermodynamics
… ascent to determine the thermodynamic state evolution of modeled systems. The SEAQT framework has seen applied to multiple systems, including quantum and gas phase systems, in addition to solid-state material phenomena. A precise definition of entropy is crucial for the application of this …
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Multi-scale models for wafer surface evolution in chemical mechanical planarization
… pattern structure effect on the post-CMP wafer profile. Model I assumes that the pad asperities contact with the wafer directly. In developing this model, at first, the pressure distribution between a rough pad and a patterned wafer is evaluated based on Greenwood and Williamson model (1966); …
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Modelización de la evolución morfodinámica de la duna de Valdevaqueros (t.m. Tarifa) mediante la aplicación de funciones empíricas ortogonales a corto, medio y largo plazo
… The current work focuses on analyzing the dune profile evolution in the long term (years), medium term (months), short term (days) and very short term (hours). Topographic data, which were collected with a total station and a differential GPS from 1995 to 2009, were interpreted from …
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Perfil clínico-epidemiológico y evolución del paciente pediátrico en el servicio de recuperación nutricional del Hospital Nacional San Juan de Dios de San Miguel periodo 2018- 2019
… between the clinical-epidemiological profile of admission and clinical evolution of children with severe malnutrition treated in the nutritional recovery service at the San Juan de Dios Hospital in San Miguel in 2018-2019. METHODOLOGY: Epidemiological study descriptive, observational, …
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Studio della maturazione di formaggi pecorino stagionati in stabilimento e in grotta
… were undertaken in order to track the lipid profile evolution, reporting the concentration of the cheese free fatty acids in object, in relation with ripening time, environment and production. In order to analyse the flavour compounds present in Pecorino cheese, the SPME-GC-MS technique has …
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Design and fabrication of asymmetric nanopores using pulsed PECVD
… not result in perfectly conformal deposition profiles, and predicting the final nanostructure is more complicated. A two dimensional feature scale model was developed to predict film profile evolution. The model was built in COMSOL, and is based on a diffusion reaction framework with a …
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Characterization, optimization, and simulation in through silicon via (TSV) dry etch
… voltage, pressure and gas flow rate to address profile defects produced by the Bosch process, such as profile bowing and sidewall scallops. A single-step etching method mixing SF6 and C4F8 gases is developed in this study as an alternative TSV etching approach to realize ultra-smooth and …
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New incision rates on the Colorado River system based on cosmogenic burial dating of terraces : implications for a transient knickpoint at Lees Ferry and differential uplift of the Rocky Mountains
… and Colorado Plateau. Comparison of river profiles and rates of incision between these rivers provides a natural laboratory for resolving controls on river evolution. Disequilibrium profiles in both rivers are evident by numerous knickpoints and convexities. By compiling existing age …
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